information & data
Product Data Sheets
13.56MHz RF generator
Available with standard output powers of 650W and 350W or configured to suit your application.
90-450kHz variable frequency with 500W output powers. Can be configured to suit your application.
The VSWR Clamp limits the impedance transient during plasma ignition aiding generator stability.
Current balance network
Used to balance the currents in multi-electrode systems.
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