Product Data Sheets

13.56MHz RF generator

13.56MHz RF generator

Available with standard output powers of 650W and 350W or configured to suit your application.


LF generator

LF generator

90-450kHz variable frequency with 500W output powers. Can be configured to suit your application.


VSWR Clamp

VSWR Clamp

The VSWR Clamp limits the impedance transient during plasma ignition aiding generator stability.


Current balance network

Current balance network

Used to balance the currents in multi-electrode systems.