download_pdf.gif

Products

13.56MHz Generator

Description: A highly efficient air-cooled generator specifically designed for exceptional stability into the dynamically varying loads associated with plasma generation.

Advantages: Many generators offer good efficiency but can become unstable when driving the variable impedances experienced during load matching. It is common to find small changes in plasma conditions, such as pressure or gas flow, causing major matching problems. easel technologies 13.56MHz generators have been designed to cope with transient load conditions and deliver excellent repeatability and stability.

Standard configurations: 350W and 650W outputs.
The modular design allows different output powers to be easily configured to suit your application.